Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor lithography. Although still in the early research phase and not ready for commercial applications, its emergence has been viewed as a potential challenger to the excimer laser systems currently used in chip production.
Chinese researchers develop solid-state 193nm DUV laser targeting advanced chipmaking
25
Mar