Intel Foundry has moved high numerical aperture (High-NA) EUV lithography into production on its Intel 18A process, with ASML confirming in a recent press release that Intel is using the expensive next-generation tool on selected layers of its latest notebook processors, including Panther Lake and the Core Ultra Series 3 built on Intel’s 18A technology. The move comes years earlier than Intel’s original roadmap, but it currently remains in use for some layers of the 18A process is not replacing standard Low-NA EUV equipment.
Intel 18A adopts High-NA EUV in dual-certification push
23
Jul